An in situ study of chemical-mechanical polishing behaviours on sapphire (0001) via simulating the chemical product-removal process by AFM-tapping mode in both liquid and air environments - Nanoscale (RSC Publishing)
Approaches to Sustainability in Chemical Mechanical Polishing (CMP): A Review | SpringerLink
Semiconductor CMP (chemical mechanical polishing) slurry quality control through density and viscosity monitoring » rheonics :: viscometer and density meter
Polishing - LNF Wiki
Semiconductor Processing: Chemical Mechanical Planarization
Introduction to Microelectronic Fabrication processes
CMP (Chemical Mechanical Polishing), what is it? - Baikowski®
Experimental study on chemical mechanical polishing of chalcogenide glasses
Scheme of mechanical polishing technology. | Download Scientific Diagram
Chemical-mechanical polishing - Wikipedia
Abrasive for Chemical Mechanical Polishing | IntechOpen
CMP pad and groove measurement in the semiconductor industry - Novacam
Pad conditioning in chemical mechanical polishing - ScienceDirect
Everything You Need to Know About Polishing Surface Finish | RapidDirect
A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization | Journal of Materials Research | Cambridge Core
Chemical mechanical planarization for microelectronics applications
PDF] Chemical mechanical polishing of thin film diamond | Semantic Scholar